Almere, the Netherlands – April 18, 2019 – Levitech B.V. announces the sales of three Levitor high-volume manufacturing RTP-systems to a Chinese customer.
“The Levitor has been specifically designed to achieve near-perfect RTP uniformity in Opto-electronics with high throughput and reliability, resulting in a low cost-of-ownership,” commented Jaap Beijersbergen, CEO of Levitech, “These main differentiators have been key during the selection process of the Levitor.”
The Chinese semiconductor manufacturer has selected the Levitor to expand their production of silicon wafers for opto-electronics applications among others.
“The Levitor penetrated the expanding Chinese semiconductor market and is contributing to its success-story”, Jaap Beijersbergen continues, “The Levitor has been proven to be a reliable RTP system that can be used in high-volume manufacturing for extensive periods of time.”
About the Levitor
The Levitor is a single-wafer RTP system based on a unique conductive heating and cooling technology. What differentiates this system from the rest of the market is its superior process performance, flexibility, cost-of-ownership and process extendibility. In the Levitor, the wafer floats on a very thin cushion of gas between two gasdividers. The gas layer between the wafer surface and the reactor walls enables ultra-fast heating or cooling, while also self-centering the wafer and keeping it suspended at the desired process temperature. The result is very precise heat transfer that is emissivity independent – totally insensitive to the type of film on the wafer.
About Levitech
Levitech is a global player in production solutions for the IC and photovoltaic industries. A spin-off of ASM International, Levitech was established in 2009 around its core product, the Levitor® system. This system is based on a revolutionary patented technology and used in the semiconductor industry for Rapid Thermal Processing (RTP). The Levitor 4300 and Levitor 4200 are leading-edge 300mm and 200mm tools for advanced RTP processes in high volume. The Levitrack™ ALD system is a state-of-the-art production solution for the solar industry and is based on the innovative concept of precursor separation in space, instead of time, in combination with the unique floating wafer and conductive heating technology used in the Levitor RTP products. For more information, visit Levitech’s web site at www.levitech.nl.
